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<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">5</article-id>
      <title-group>
        <article-title>Device and technology simulation of IGBT on SOI structure</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Device and technology simulation of IGBT on SOI structure</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Lovshenko</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Stempitsky</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Trung</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">Belarusian State University of Informatics and Radioelectronics</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2014-07-01">
        <day>01</day>
        <month>07</month>
        <year>2014</year>
      </pub-date>
      <volume>20</volume>
      <issue>2</issue>
      <fpage>111</fpage>
      <lpage>117</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/MPM220_05_lovshenko.pdf"/>
      <abstract xml:lang="en">
        <p>Results of computer simulation of manufacturing a bipolar transistor with insulated gate (IGBT) on the base of technology “Silicon on insulator” (SOI) are presented. Current-voltage characteristics of the investigated IGBT device were calculated. The results obtained were used as a base for optimization of the most significant technological parameter, a gate oxide thickness. It is shown that the gate oxide thickness has a significant impact on the electrical characteristics of the IGBT. The calculated values of the switch-on and switch-off times less than one order, and the value of the collector current is more than two orders of magnitude for the vertical structure of the IGBT based on bulk silicon in comparison with IGBT on SOI structure.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>IGBT</kwd>
        <kwd>SOI</kwd>
        <kwd>computer simulation of manufacturing</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
