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<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">1</article-id>
      <article-id pub-id-type="doi">10.18149/MPM.4832022_1</article-id>
      <title-group>
        <article-title>Effect of Si+ ion irradiation of α-Ga2O3 epitaxial layers on their hydrogen sensitivity</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Effect of Si+ ion irradiation of α-Ga2O3 epitaxial layers on their hydrogen sensitivity</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Yakovlev</surname>
            <given-names>N.N.</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Almaev</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Butenko</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Mikhaylov</surname>
            <given-names>A.N.</given-names>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Pechnikov</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Stepanov</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Timashov</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Chikiryaka</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nikolaev</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">Tomsk State University</aff>
      <aff id="aff2">Ioffe Institute</aff>
      <aff id="aff3">Lobachevsky State University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2022-07-07">
        <day>07</day>
        <month>07</month>
        <year>2022</year>
      </pub-date>
      <volume>48</volume>
      <issue>3</issue>
      <fpage>301</fpage>
      <lpage>307</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/1-N_N_-Yakovlev%2C-A_V_-Almaev%2C-P_N_-Butenko-et-al.pdf"/>
      <abstract xml:lang="en">
        <p>The effect of Si+ ion irradiation of α-Ga2O3 at doses of 8·1012 cm-2, 8·1014 cm-2, and energy of 100 keV on the gas-sensitive properties has been studied. It is shown that irradiation of α-Ga2O3 layer grown by halide vapor phase epitaxy with implanted Si+ ions allows effective control of its sensitivity to H2, response, and recovery times, as well as varying the operating temperatures. The maximum sensitivity to H2 occurred for samples with Si+ ion irradiation dose of 8·1012 cm-2 at 400ºC. The mechanism of sensitivity of α-Ga2O3 epitaxial layers irradiated with Si+ to H2 is discussed.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>α-Ga2O3</kwd>
        <kwd>halide vapor phase epitaxy</kwd>
        <kwd>ion implantation</kwd>
        <kwd>gas sensitivity</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
