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<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">6</article-id>
      <article-id pub-id-type="doi">10.18149/MPM.5322025_6</article-id>
      <title-group>
        <article-title>Effects of post-annealing duration on the properties of β-Ga2O3 thin films prepared by spray pyrolysis</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Effects of post-annealing duration on the properties of β-Ga2O3 thin films prepared by spray pyrolysis</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Zhang</surname>
            <given-names>Xi.</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Panov</surname>
            <given-names>Dmitrii</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Spiridonov</surname>
            <given-names>Vladislav</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Kuzmenko</surname>
            <given-names>Natalia</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Prasolov</surname>
            <given-names>Nikita</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Ivanov</surname>
            <given-names>Andrey</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Dorogov</surname>
            <given-names>Maksim</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Wei</surname>
            <given-names>Haoming</given-names>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Jiang.</surname>
            <given-names>Dayong</given-names>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Bauman</surname>
            <given-names>Dmitrii</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-3738-408X</contrib-id>
          <contrib-id contrib-id-type="scopus">7202768874</contrib-id>
          <contrib-id contrib-id-type="researcherid">F-1445-2014</contrib-id>
          <name>
            <surname>Romanov</surname>
            <given-names>Alexey</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>alexey.romanov@niuitmo.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">ITMO University</aff>
      <aff id="aff2">Togliatti State University</aff>
      <aff id="aff3">School of Materials Science and Engineering, Changchun University of Science and Technology</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2025-10-16">
        <day>16</day>
        <month>10</month>
        <year>2025</year>
      </pub-date>
      <volume>53</volume>
      <issue>2</issue>
      <fpage>55</fpage>
      <lpage>63</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/Vol%2053%20No%202/6_zhang.pdf"/>
      <abstract xml:lang="en">
        <p>The post-annealing duration dependence of structural and optical properties of polycrystalline β-Ga2O3 thin films fabricated on sapphire (Al2O3) substrate via the spray pyrolysis method are presented. Extending the annealing time for fixed temperature 900 °C from 1 to 2 h improves crystallinity of the films, as evidenced by an increase in the average grain size approximately from 8 to 14 nm, a reduction in the full width at half maximum of the   β-Ga2O3 diffraction peak from 0.43 to 0.29°. However, extending the post-annealing duration to 3 h induces excessive grain coarsening into island-like crystalline domains. These findings demonstrate that for the chosen experimental conditions, a 2-hour annealing at 900 °C represents an optimum for achieving relatively smooth and solid β-Ga2O3 films while balancing crystallinity and film homogeneity.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>Ga2O3 film</kwd>
        <kwd>spray pyrolysis</kwd>
        <kwd>sol-gel</kwd>
        <kwd>post-anneal</kwd>
        <kwd>duration</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
