<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">10</article-id>
      <article-id pub-id-type="doi">10.18149/MPM.5342025_10</article-id>
      <title-group>
        <article-title>Fabrication and characterization of NiO/AZO heterojunction  thin film diodes by radio frequency magnetron sputtering</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Fabrication and characterization of NiO/AZO heterojunction  thin film diodes by radio frequency magnetron sputtering</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0009-0007-5263-3087</contrib-id>
          <name>
            <surname>Tran</surname>
            <given-names>Bao Quan</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0009-0009-5422-867X</contrib-id>
          <name>
            <surname>Ngo</surname>
            <given-names>Thi Nhu Huynh</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nguyen</surname>
            <given-names>Khac Binh</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Duong</surname>
            <given-names>Hong Diu Tho</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Thach</surname>
            <given-names>Bao Khang</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-8475-0225</contrib-id>
          <name>
            <surname>Pham</surname>
            <given-names>Hoai Phuong</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-6205-0850</contrib-id>
          <name>
            <surname>Ngo</surname>
            <given-names>Hai Dang</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0009-0000-4865-3420</contrib-id>
          <name>
            <surname>Pham</surname>
            <given-names>Thi Kim Hang</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">Ho Chi Minh City University of Technology and Education</aff>
      <aff id="aff2">Nguyen Tat Thanh University Center for Hi-Tech Development</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2025-11-29">
        <day>29</day>
        <month>11</month>
        <year>2025</year>
      </pub-date>
      <volume>53</volume>
      <issue>4</issue>
      <fpage>120</fpage>
      <lpage>130</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/Vol%2053%20No%204/10_tran_bq_et_al.pdf"/>
      <abstract xml:lang="en">
        <p>This study focuses on the fabrication and investigation of the properties of the heterojunction p-NiO/n-Al-doped ZnO via the radio frequency magnetron sputtering method. We conducted a detailed evaluation of the crystal structure, optical properties, and electrical properties of the NiO and Al-doped ZnO monolayers using advanced techniques such as X-ray diffraction, ultraviolet-visible spectroscopy, and Hall effect measurements. X-ray diffraction results show that the NiO thin film crystallizes in the (111) and (200) peaks with a characteristic NaCl-type cubic structure, while the Al-doped ZnO thin film preferentially develops in the (002) peak, exhibiting a hexagonal wurtzite structure. UV–Vis transmission spectrum analysis indicates that the NiO and Al-doped ZnO thin films exhibit transmittance rates of 52 and 92 % in the visible light region, respectively. The optical band gap energy was determined to be 3.45 eV for NiO and 3.36 eV for Al-doped ZnO, respectively. In addition, the carrier concentration in both single layers reached a high level, around 1019 cm-3. The J-V characteristics under optimal conditions confirmed the formation of the NiO/AZO heterojunction with a turn-on voltage of 0.67 V, an ideality factor of 4.44, and a barrier potential height of 0.5 eV. Especially, the influence of light with a wavelength of 365 nm, this heterojunction clearly exhibited the characteristics of a photodiode. These results demonstrate the remarkable potential applications of the p-NiO/n-AZO heterojunction in the fields of optoelectronics and light sensors.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>Al-doped ZnO</kwd>
        <kwd>NiO</kwd>
        <kwd>photodiode</kwd>
        <kwd>heterojunction</kwd>
        <kwd>RF-magnetron sputtering</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
