Ab initio studies of silver precursor for febid: Ag(PMe3)n n=2,3,4


The detailed structure, thermal and chemical stability of the Ag(PMe3)n compounds were studied by applying quantum chemical method. The results obtained showed that Ag(PMe3)2 and Ag(PMe3)4 could be used as precursors for FEBID. The appearance energy of Ag was evaluated to find the most promising dissociation ways.