<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">9</article-id>
      <title-group>
        <article-title>Study of β-Ga2O3 epitaxial layers and single crystals by nanoindentation technique</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Исследование эпитаксиальных слоёв и монокристаллов β-Ga2O3 методом наноиндентирования</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-4205-3226</contrib-id>
          <name>
            <surname>Guzilova</surname>
            <given-names>L.I.</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Grashchenko</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Pechnikov</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Maslov</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Zav'yalov</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Abdrachmanov</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-3738-408X</contrib-id>
          <contrib-id contrib-id-type="scopus">7202768874</contrib-id>
          <contrib-id contrib-id-type="researcherid">F-1445-2014</contrib-id>
          <name>
            <surname>Romanov</surname>
            <given-names>Alexey</given-names>
          </name>
          <xref ref-type="aff" rid="aff4"/>
          <email>alexey.romanov@niuitmo.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nikolaev</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">Ioffe Institute</aff>
      <aff id="aff2">Institute of Problems of Mechanical Engineering RAS</aff>
      <aff id="aff3">Volgograd State Technical University</aff>
      <aff id="aff4">ITMO University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2016-12-31">
        <day>31</day>
        <month>12</month>
        <year>2016</year>
      </pub-date>
      <volume>29</volume>
      <issue>2</issue>
      <fpage>166</fpage>
      <lpage>171</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/MPM229_09_guzilova.pdf"/>
      <abstract xml:lang="en">
        <p>This paper describes the determination of the hardness and the Young's modulus of β-Ga2O3 single crystals and epitaxial layers by nanoindentation technique. The measurements were performed on (100) plane of β-Ga2O3 single crystals produced by free crystallisation method and on (-311) and (-201) planes of β-Ga2O3 epitaxial layers grown on m- and c-oriented sapphire substrates by halide vapour phase epitaxy. The analysis of the experimental data was performed using Oliver-Pharr method. Theoretical values of Young.s modulus were calculated by density functional theory. The value of the Young's modulus of 234 GPa was measured for (100) β-Ga2O3 single crystals. The hardness and the Young's modulus for β-Ga2O3 epitaxial layers, were 12.5 GPa and 225 GPa for (-201) plane and 17 GPa and 300 GPa for (-311) plane, respectively.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>nanoindentation technique</kwd>
        <kwd>β-Ga2O3 single crystals</kwd>
        <kwd>β-Ga2O3 epitaxial layers</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
