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  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">11</article-id>
      <article-id pub-id-type="doi">10.18720/MPM.3222017_11</article-id>
      <title-group>
        <article-title>Study of antireflection coatings for high speed 1.3 -1.55 µm InGaAs/InP PIN photodetector</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Study of antireflection coatings for high speed 1.3 -1.55 µm InGaAs/InP PIN photodetector</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Kolodeznyi</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Novikov</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Gladyshev</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Rochas</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Sharipo</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Karachinsky</surname>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Egorov</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>V.E. Bougrov</surname>
          </name>
          <xref ref-type="aff" rid="aff3"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">ITMO Univesity</aff>
      <aff id="aff2">Connector Optics LLC</aff>
      <aff id="aff3">ITMO University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2017-11-15">
        <day>15</day>
        <month>11</month>
        <year>2017</year>
      </pub-date>
      <volume>32</volume>
      <issue>2</issue>
      <fpage>194</fpage>
      <lpage>197</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/MPM232_11_kolodeznyi.pdf"/>
      <abstract xml:lang="en">
        <p>Single layer antireflection coatings have been studied for optimization InGaAs/InP photodetector with normal incident light over the 1300-1550-nm wavelength range. Silicon nitride coatings with various thicknesses were fabricated using plasma enhanced chemical vapor deposition and inductively coupled plasma chemical vapor deposition. The antireflection coating with thickness of 200 nm demonstrated reflection below 10 % at 1550 nm wavelength.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>single layer antireflection coating</kwd>
        <kwd>silicon nitride coating</kwd>
        <kwd>InGaAs/InP photodetector</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
