https://www.elibrary.ru/title_about_new.asp?i Materials physics and mechanics Механика и физика материалов 1605-8119 4 10.18720/MPM.3912018_4 Ab initio studies of silver precursor for febid: Ag(PMe3)n n=2,3,4 Ab initio studies of silver precursor for febid: Ag(PMe3)n n=2,3,4 Tamuliene Institute of Theoretical Physics and Astronomy of Vilnius University 03 08 2018 39 1 21 26

The detailed structure, thermal and chemical stability of the Ag(PMe3)n compounds were studied by applying quantum chemical method. The results obtained showed that Ag(PMe3)2 and Ag(PMe3)4 could be used as precursors for FEBID. The appearance energy of Ag was evaluated to find the most promising dissociation ways.

 Ag compound DFT calculation dissociation precursor