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<article article-type="research-article" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-id journal-id-type="elibrary">https://www.elibrary.ru/title_about_new.asp?i</journal-id>
      <journal-title-group>
        <journal-title>Materials physics and mechanics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Механика и физика материалов</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">1605-8119</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">6</article-id>
      <article-id pub-id-type="doi">10.18149/MPM.5132023_6</article-id>
      <title-group>
        <article-title>The analysis of the etch pits parameters in the (-201) plane of the β-Ga2O3 substrate crystals</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>The analysis of the etch pits parameters in the (-201) plane of the β-Ga2O3 substrate crystals</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Zarichny</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Butenko</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Boiko</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Sharkov</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nikolaev</surname>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
      </contrib-group>
      <aff id="aff1">Ioffe Institute</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2023-06-30">
        <day>30</day>
        <month>06</month>
        <year>2023</year>
      </pub-date>
      <volume>51</volume>
      <issue>3</issue>
      <fpage>46</fpage>
      <lpage>51</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://mpm.spbstu.ru/userfiles/files/6-A_A_-Zarichny.pdf"/>
      <abstract xml:lang="en">
        <p>Selective wet etching technique was applied to commercial (-201) β-Ga2O3  single crystal substrates. Some etching recipes allowed us to reveal sharp etch pits on the surface of the substrates. The geometric shape, orientation and density of etch pits were investigated in as-delivered specimens. An observation of mutual location of the etch pits indicates the likely formation low-angle grain boundaries that can form upon heating. Selective wet etching technique was applied to commercial (-201) β-Ga2O3   single crystal substrates. Some etching recipes allowed us to reveal sharp etch pits on the surface of the substrates. The geometric shape, orientation and density of etch pits were investigated in as-delivered specimens. An observation of mutual location of the etch pits indicates the likely formation low-angle grain boundaries that can form upon heating.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>selective wet etching</kwd>
        <kwd>β-Ga2O3</kwd>
        <kwd>gallium oxide</kwd>
        <kwd>semiconductor</kwd>
        <kwd>crystal substrate</kwd>
        <kwd>low-angle grain boundaries</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
