Ab initio studies of silver precursor for febid: Ag(PMe3)n n=2,3,4

The detailed structure, thermal and chemical stability of the Ag(PMe₃)_n compounds were studied by applying quantum chemical method. The results obtained showed that Ag(PMe₃)₂ and Ag(PMe₃)₄ could be used as precursors for FEBID. The appearance energy of Ag was evaluated to find the most promising dissociation ways.