Fabrication of p-type transparent oxide films with delafossite structure by sol-gel processing

doi:10.18720/MPM.3232017_8

Fabrication of p-type transparent oxide films with delafossite structure by sol-gel processing

Авторы:

E.V. Shirshneva-Vaschenko L.A. Sokura T.G. Liashenko E. Podlesnov В.Е. Бугров А. Е. Романов

Аннотация:

CuAlO₂, CuAl_1-хMg_хO₂, CuCrO₂, CuCr_1-хMg_хO₂ and CuAl_0.5Cr_0.5O₂ thin films were deposited on quartz substrates by sol-gel processing using spin coating technique. The elemental compositions, synthesis mechanisms, optical transmittance and resistivity of prepared films were studied. CuAl_0.5Cr_0.5O₂ films had the best characteristics under lower temperature of synthesis. Optical transmittance of CuAl_0.5Cr_0.5O₂ reached 70 % in visible region. The resistivity of CuAl_0.5Cr_0.5O₂ was 0,4 kΩ·cm and was stable with time. Thus, CuAl_0.5Cr_0.5O₂ films may have potential applications for transparent optoelectronics as pconductivity transparent oxides.