Misfit Dislocation Walls in Films with Alternate Layers

We suggest a new mechanism for misfit strain accommodation in misfitting multilayer films with alternate layers through the generation of misfit dislocation walls. The detailed analysis of the necessary conditions for their appearance shows that, similar to one-layer films, misfit dislocation walls form above some critical film thicknesses which can be increased by varying the relation between thicknesses of adjoining film layers.