Nanostructured composite materials for 3D elements of advanced optical systems


Nanocomposite materials electroplating for nano- and micro-fabrication with Si mold and LIGA-like technological process is proposed. UV lithography based on SU-8 photoresist for ultra-thick 3D structures is described. Two-stage process for high aspect ratio vertical metal structures fabrication is considered. Possible applications of the proposed technological approaches for advanced optical systems are described.