The effect of the magnetron discharge power on the deposition rate of chrome coating obtained by spattering an uncooled extended target

The effect of the magnetron discharge power in the range from 2.2 to 8.2 kW on the deposition rate of chrome coatings obtained by spraying an uncooled and cooled planar extended target is studied. The coatings were applied to 12Cr18Ni10Ti stainless steel samples with temperature control using a chromel-copel thermocouple. It is shown that the deposition rate of coatings for an uncooled chrome target increases non-linearly with an increase in power of more than 6.5 kW, and at a power of 8.2 kW reaches 45 µm/h, which is more than 2 times higher than for a cooled target. The results obtained indicate the prospects of using such extended magnetron systems to solve a number of applied problems in the energy sector, in particular, the formation of thermal barrier coatings on the domestic gas turbine blades.