MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Antonova
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Antonova
Antonova
Affiliation
Institute of Semiconductor Physics, RAS
Novosibirsk, Russia

Nanostructured Layers in High Temperature — Pressure Treated Silicon Implanted with Hydrogen / Helium

A. Misiuk J. Bak - Misiuk M. Kaniewska K.S. Zhuravlev V. Raineri I.V. Antonova
  • Year: 2002
  • Volume: 5
  • Issue: 1
  • 3
  • 2095
  • Pages: 31-38