MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Kazakin
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Kazakin
Kazakin
Affiliation
Alferov University
St. Petersburg, Russia

MEMS gas sensor of resistive type for detection of hydrogen sulfide down to low concentrations

Komarevtsev I.M. Kondrateva A. Kazakin A.N. Enns Ya.B. Lazdin I.A. Karaseov P.A. Akulshin U.D.
  • Year: 2024
  • Volume: 52
  • Issue: 4
  • 51
  • 2499
  • Pages: 9-22