Articles by keywords "Pb(Zr,Ti)O3 (PZT) films; RF magnetron sputtering; silicon substrate; pressure of the argon-oxygen gas; self-polarization vector" | Materials physics and mechanics

MPM

Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University

Since 2000

ISSN 1605-8119

Submit Your Paper

Articles by keywords "Pb(Zr,Ti)O3 (PZT) films; RF magnetron sputtering; silicon substrate; pressure of the argon-oxygen gas; self-polarization vector"

Formation mechanisms and the orientation of self-polarization in PZT polycristalline thin films

I.P. Pronin S.A. Kukushkin V.V. Spirin S.V. Senkevich E.Yu. Kaptelov D.M. Dolgintsev V.P. Pronin D.A. Kiselev O.N. Sergeeva

Year: 2017
Volume: 30
Issue: 1

5
1009
Pages: 20-34