Articles by keywords "Pb(Zr,Ti)O3 (PZT) films; RF magnetron sputtering; silicon substrate; pressure of the argon-oxygen gas; self-polarization vector"

Formation mechanisms and the orientation of self-polarization in PZT polycristalline thin films

  • Year: 2017
  • Volume: 30
  • Issue: 1
  • 5
  • 826
  • Pages: 20-34