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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "SAW propagation; GaAs surface; diagnostics; thin Au film"

Surface Acoustic Wave Monitoring of Thin Au Film Deposition on GaAs Surface

D.V. Lioubtchenko T.A. Briantseva I.A. Markov
  • Year: 2011
  • Volume: 12
  • Issue: 1
  • 2
  • 940
  • Pages: 64-75