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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "SiC actuation layer"

Silicon carbide membranes for micro-electro-mechanical-systems based CMUT with influence factors

Pal M. Maity N.P. Maity R.
  • Year: 2022
  • Volume: 49
  • Issue: 1
  • 33
  • 644
  • Pages: 85-96