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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Articles by keywords "cooled target"

The effect of the magnetron discharge power on the deposition rate of chrome coating obtained by spattering an uncooled extended target

Kachalin G.V. Medvedev K.S. Tkhabisimov A.B. Iliukhin D.I.
  • Year: 2025
  • Volume: 53
  • Issue: 2
  • 10
  • 273
  • Pages: 149-156