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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Articles by keywords "magnetron sputtering"

Fabrication and characterization of NiO/AZO heterojunction thin film diodes by radio frequency magnetron sputtering

Tran B.Q. Ngo T.N.H. Nguyen K.B. Duong H.D.T. Thach B.K. Pham H.P. Ngo H.D. Pham T.K.H.
  • Year: 2025
  • Volume: 53
  • Issue: 4
  • 0
  • 10
  • Pages: 120-130

The effect of the magnetron discharge power on the deposition rate of chrome coating obtained by spattering an uncooled extended target

Kachalin G.V. Medvedev K.S. Tkhabisimov A.B. Iliukhin D.I.
  • Year: 2025
  • Volume: 53
  • Issue: 2
  • 10
  • 273
  • Pages: 149-156

Results of measurements of substrate deformation and determination by bending of internal stresses in Ti-TiC-DLC coating obtained by using HiPIMS technology

A.V. Ryzhenkov A.V. Volkov A.F. Mednikov Tkhabisimov A.B. O.S. Zilova S.V. Sidorov
  • Year: 2021
  • Volume: 47
  • Issue: 2
  • 37
  • 2056
  • Pages: 285-292

Formation mechanisms and the orientation of self-polarization in PZT polycristalline thin films

I.P. Pronin S.A. Kukushkin V.V. Spirin S.V. Senkevich E.Yu. Kaptelov D.M. Dolgintsev V.P. Pronin D.A. Kiselev O.N. Sergeeva
  • Year: 2017
  • Volume: 30
  • Issue: 1
  • 14
  • 2217
  • Pages: 20-34