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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "nanoceramics; zirconium dioxide (zirconia); sol-gel method"

Usage of nanoceramic based on ZrO2 in fabrication of sources for magnetron sputtering

V.G. Konakov I.A. Ovid’ko O.Yu. Kurapova N.N. Novik I.Yu. Archakov
  • Year: 2014
  • Volume: 21
  • Issue: 3
  • 12
  • 1260
  • Pages: 305-310