Thin films of gallium oxide obtained by spray-pyrolysis: method and properties

Authors:
D.I. Panov Zhang X. V.A. Spiridonov Azina L.V. R.K. Nuryev Prasolov N.D. L.A. Sokura D.A. Bauman V.E. Bougrov A.E. Romanov
Abstract:

In this article, we report on fabricating thin solid films of gallium oxide by the spray-pyrolysis method. This method allows obtaining uniform thin films more easily compared with other sol-gel methods like spin-coating or dip-coating. In the experiment, sol concentrations were experimentally selected for further deposition on substrates. Morphology and chemical composition of the deposited films were studied by Scanning Electron Microscopy and Energy-Dispersive X-ray spectroscopy, respectively. The structural properties of the films were analyzed by X-ray diffraction method. The band gap of the Ga2O3 films was estimated by analyzing the optical transmission spectra and was 4.87 eV. The quality and homogeneity of the obtained coatings are evaluated.