MPM
    Materials physics and mechanicsPeter the Great St. Petersburg Polytechnic University
    Since 2000
    ISSN 1605-8119
    enАнглийский
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    AuthorGusev
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    Gusev
    Gusev
    Affiliation
    Southern Federal University
    Rostov-on-Don, Russia

    Effect of PECVD conditions on mechanical stress of silicon films

    E.Yu. GusevJ.Y. JityaevaO.A. Ageev
    • Year: 2018
    • Volume: 37
    • Issue: 1
    • 20
    • 3034
    • Pages: 67-72