D.V. Leshchev
  • Affiliation
    Peter the Great St. Petersburg Polytechnic University
  • St.Petersburg, Russia

Gas-jet method of metal film deposition: direct simulation monte-carlo of He-Ag mixture flow

  • Year: 2018
  • Volume: 38
  • Issue: 1
  • 7
  • 533
  • Pages: 119-130