MPM
    Materials physics and mechanicsPeter the Great St. Petersburg Polytechnic University
    Since 2000
    ISSN 1605-8119
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    AuthorIevlev
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    Ievlev
    Ievlev
    Affiliation
    The Voronezh State Technical University
    Voronezh, Russia

    On the Nature of Layer Substructure of Doped Silicon Films

    V.M. IevlevE.V. ShvedovG.V. Merkulov
    • Year: 2004
    • Volume: 7
    • Issue: 1
    • 2
    • 2766
    • Pages: 67-71