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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Shvedov
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Shvedov
Shvedov
Affiliation
The Voronezh State Technical University
Voronezh, Russia

On the Nature of Layer Substructure of Doped Silicon Films

V.M. Ievlev E.V. Shvedov G.V. Merkulov
  • Year: 2004
  • Volume: 7
  • Issue: 1
  • 2
  • 1715
  • Pages: 67-71