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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "mechanical stress; silicon film; SiOx; PECVD; profilometry"

Effect of PECVD conditions on mechanical stress of silicon films

E.Yu. Gusev J.Y. Jityaeva O.A. Ageev
  • Year: 2018
  • Volume: 37
  • Issue: 1
  • 19
  • 2508
  • Pages: 67-72