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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Ageev
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Ageev
Ageev
Affiliation
Southern Federal University
Rostov-on-Don, Russia

Effect of PECVD conditions on mechanical stress of silicon films

E.Yu. Gusev J.Y. Jityaeva O.A. Ageev
  • Year: 2018
  • Volume: 37
  • Issue: 1
  • 19
  • 1974
  • Pages: 67-72