MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Kasatkin
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Kasatkin
Kasatkin
Affiliation
St.Petersburg State University
St.Petersburg, Russia

Formation of ordered ZnO structures grown by the ALD method on hybrid SiC/Si (100) substrates

S.A. Kukushkin A.V. Osipov I.A. Kasatkin V.Y. Mikhailovskii A.I. Romanychev
  • Year: 2019
  • Volume: 42
  • Issue: 1
  • 11
  • 2479
  • Pages: 30-39