MPM
    Materials physics and mechanicsPeter the Great St. Petersburg Polytechnic University
    Since 2000
    ISSN 1605-8119
    enАнглийский
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    AuthorMikhailovskii
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    Mikhailovskii
    Mikhailovskii
    Affiliation
    St.Petersburg State University
    St.Petersburg, Russia

    Formation of ordered ZnO structures grown by the ALD method on hybrid SiC/Si (100) substrates

    S.A. KukushkinA.V. OsipovI.A. KasatkinV.Y. MikhailovskiiA.I. Romanychev
    • Year: 2019
    • Volume: 42
    • Issue: 1
    • 13
    • 3806
    • Pages: 30-39