MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Sakharov
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Sakharov
Sakharov
Affiliation
Tomsk State University of Control Systems and Radioelectronics (TUSUR)
Tomsk, Russia

Structure and properties of nanoporous oxide dielectrics modified by carbon

Yu.V. Sakharov
  • Year: 2020
  • Volume: 44
  • Issue: 1
  • 12
  • 2029
  • Pages: 110-115