MPM
    Materials physics and mechanicsPeter the Great St. Petersburg Polytechnic University
    Since 2000
    ISSN 1605-8119
    enАнглийский
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    AuthorSakharov
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    Sakharov
    Sakharov
    Affiliation
    Tomsk State University of Control Systems and Radioelectronics (TUSUR)
    Tomsk, Russia

    Structure and properties of nanoporous oxide dielectrics modified by carbon

    Yu.V. Sakharov
    • Year: 2020
    • Volume: 44
    • Issue: 1
    • 12
    • 2663
    • Pages: 110-115