Latest issues
- 2025, Volume 53 Issue 6
- 2025, Volume 53 Issue 5
- 2025, Volume 53 Issue 4
- 2025, Volume 53 Issue 3
Effect of PECVD conditions on mechanical stress of silicon films
- 19
- 2168
- Pages: 67-72
Temperature field of the irradiated material in the laser-induced damage
- 3
- 2054
- Pages: 100-103