Latest issues
- 2023, Volume 51 Issue 4
- 2023, Volume 51 Issue 3
- 2023, Volume 51 Issue 2
- 2023, Volume 51 Issue 1
Effect of PECVD conditions on mechanical stress of silicon films
- 12
- 837
- Pages: 67-72
Temperature field of the irradiated material in the laser-induced damage
- 2
- 727
- Pages: 100-103