Latest issues
- 2026,Volume 54Issue 2
- 2026,Volume 54Issue 1
- 2025,Volume 53Issue 6
- 2025,Volume 53Issue 5
Effect of PECVD conditions on mechanical stress of silicon films
- 20
- 3115
- Pages: 67-72
Temperature field of the irradiated material in the laser-induced damage
- 3
- 2899
- Pages: 100-103


