Latest issues
- 2024, Volume 52 Issue 1
- 2023, Volume 51 Issue 7
- 2023, Volume 51 Issue 6
- 2023, Volume 51 Issue 5
Effect of PECVD conditions on mechanical stress of silicon films
- 13
- 915
- Pages: 67-72
Temperature field of the irradiated material in the laser-induced damage
- 2
- 815
- Pages: 100-103