MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Kulagina
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Kulagina
Kulagina
Affiliation
Ioffe Institute
Saint Petersburg, Russia

Surface morphology of InGaAs and InP layers after local Zn diffusion from the vapor phase in the MOCVD reactor

S.A. Blokhin Levin R.V. Epoletov V.S. Kuzmenkov A.G. A.A. Blokhin Bobrov M.A. Kovach Y.N. Maleev N.A. Prasolov N.D. Kulagina M.M. Guseva Yu.А. Zadiranov Yu.М. Nikitina E.V. Andryushkin V.V. Vasil’ev A.P. Voropaev K.O.
  • Year: 2023
  • Volume: 51
  • Issue: 5
  • 49
  • 1512
  • Pages: 142-151