MPM
    Materials physics and mechanicsPeter the Great St. Petersburg Polytechnic University
    Since 2000
    ISSN 1605-8119
    enАнглийский
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    AuthorNikitina
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    Nikitina
    Nikitina
    Affiliation
    Alferov University
    Saint Petersburg, Russia

    Peculiarities of the two-stage Zn diffusion profile formation from vapor phase into InGaAs/InP heterostructure for avalanche photodiode fabrication

    S.A. BlokhinLevin R.V. Epoletov V.S. Kuzmenkov A.G.A.A. BlokhinBobrov M.A.Kovach Y.N. Maleev N.A. Nikitina E.V.Andryushkin V.V.Vasil’ev A.P. Voropaev K.O.
    • Year: 2023
    • Volume: 51
    • Issue: 4
    • 33
    • 1903
    • Pages: 66-75

    Surface morphology of InGaAs and InP layers after local Zn diffusion from the vapor phase in the MOCVD reactor

    S.A. BlokhinLevin R.V. Epoletov V.S. Kuzmenkov A.G.A.A. BlokhinBobrov M.A.Kovach Y.N. Maleev N.A. Prasolov N.D.Kulagina M.M.Guseva Yu.А.Zadiranov Yu.М.Nikitina E.V.Andryushkin V.V.Vasil’ev A.P. Voropaev K.O.
    • Year: 2023
    • Volume: 51
    • Issue: 5
    • 60
    • 2315
    • Pages: 142-151