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Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "CVD"

Spalling-induced β-Ga2O3 lift-off protocol

P.N. Butenko A.V. Chikiryaka M.E. Boiko Guzilova L.I. V.M. Krymov Obidov B.A. R.B.Timashov Shapenkov S.V. M.D. Sharkov V.I. Nikolaev
  • Year: 2024
  • Volume: 52
  • Issue: 5
  • 23
  • 2413
  • Pages: 55-63

Effect of PECVD conditions on mechanical stress of silicon films

E.Yu. Gusev J.Y. Jityaeva O.A. Ageev
  • Year: 2018
  • Volume: 37
  • Issue: 1
  • 19
  • 1975
  • Pages: 67-72

Hot Wire CVD of Heterogeneous and Polycrystalline Silicon Semiconducting Thin Films for Applications in Thin Film Transistors and Solar Cells

  • Year: 2000
  • Volume: 1
  • Issue: 2
  • 7
  • 2243
  • Pages: 73-82