MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author M.D. Sharkov
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M.D. Sharkov
  • Affiliation
    Ioffe Institute
  • St.Petersburg, Russia

Growth of SiC films by the method of substitution of atoms on porous Si (100) and (111) substrates

V.V. Kidalov S.A. Kukushkin A.V. Osipov A.V. Redkov A.S. Grashchenko I.P. Soshnikov M.E. Boiko M.D. Sharkov A.F. Dyadenchuk
  • Year: 2018
  • Volume: 36
  • Issue: 1
  • 25
  • 1102
  • Pages: 39-52