MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Kidalov
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Kidalov
Kidalov
Affiliation
Berdyansk State Pedagogical University
Berdyansk, Ukraine

Growth of SiC films by the method of substitution of atoms on porous Si (100) and (111) substrates

V.V. Kidalov S.A. Kukushkin A.V. Osipov A.V. Redkov A.S. Grashchenko I.P. Soshnikov M.E. Boiko M.D. Sharkov A.F. Dyadenchuk
  • Year: 2018
  • Volume: 36
  • Issue: 1
  • 48
  • 2963
  • Pages: 39-52