MPM
Materials physics and mechanics Peter the Great St. Petersburg Polytechnic University
Since 2000
ISSN 1605-8119
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Author Nikitina
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Nikitina
Nikitina
Affiliation
Alferov University
Saint Petersburg, Russia

Peculiarities of the two-stage Zn diffusion profile formation from vapor phase into InGaAs/InP heterostructure for avalanche photodiode fabrication

S.A. Blokhin Levin R.V. Epoletov V.S. Kuzmenkov A.G. A.A. Blokhin Bobrov M.A. Kovach Y.N. Maleev N.A. Nikitina E.V. Andryushkin V.V. Vasil’ev A.P. Voropaev K.O.
  • Year: 2023
  • Volume: 51
  • Issue: 4
  • 32
  • 1454
  • Pages: 66-75

Surface morphology of InGaAs and InP layers after local Zn diffusion from the vapor phase in the MOCVD reactor

S.A. Blokhin Levin R.V. Epoletov V.S. Kuzmenkov A.G. A.A. Blokhin Bobrov M.A. Kovach Y.N. Maleev N.A. Prasolov N.D. Kulagina M.M. Guseva Yu.А. Zadiranov Yu.М. Nikitina E.V. Andryushkin V.V. Vasil’ev A.P. Voropaev K.O.
  • Year: 2023
  • Volume: 51
  • Issue: 5
  • 52
  • 1776
  • Pages: 142-151